AT OAK RIDGE NATIONAL LABORATORY, THE INTEGRATED SILICON PILLAR ARRAY IS COMPOSED OF 18 MICRON TALL 800 MM WIDE PILLARS IN A HEXAGONAL ARRANGEMENT.

The interstitial spaces between pillars form a perfectly ordered network of nanofludic channels with widths from below 100 to 900nm. The exact channel width is tailored by overcoating pillars with highly conformal layer using plasma enhanced chemical vapor deposition (PECVD) or atomic layer deposition (ALD). The bifurcating (tree-like) system of channels is up to 250 micron wide and provides an interface between the network of nanopores and the macroscopic experimental environment. This image was originally produced in black and white and was colorized afterward.